Method of forming redistribution layer

ABSTRACT

A structure of an under bump metallization and a method of forming the same are provided. The under bump metallization has a redistribution via hole, viewed from the top, in a round shape or a polygon shape having an angle between adjacent edges greater than 90°. Therefore, the step coverage of the later formed metal layer can be improved.

RELATED APPLICATIONS

The present application is a Divisional application of the applicationSer. No. 14/179,688, filed Feb. 13, 2014, all of which are hereinincorporated by reference.

BACKGROUND

The most important trend in the semiconductor industry over the lastseveral decades has been a continued striving to improve deviceperformance, which also requires a continuous decrease of semiconductordevice feature sizes. In present day semiconductor devices, it is commonto encounter feature size in the deep sub-micron range. With thisdecrease in feature size, sub-micron metal interconnects becomeincreasingly more important. Ideally, a metal layer should be evenlydeposited and should fill the profile for the metal line with equalmetal density. However, for the sizes of sub-micron metal interconnects,poor step coverage of the deposited metal layer is often encountered.Moreover, when the thickness of the sub-micron metal interconnects isincreased to solve the RC delay problem, the poor step coverage problemwill only become more serious.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isnoted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIG. 1A is a top-viewed diagram of a metal layer deposited in aconventional redistribution via hole, which has been partially filled bythe metal layer.

FIG. 1B is a scanning electron microscopic image showing across-sectional view after a metal layer deposited in a conventionalredistribution via hole.

FIG. 2A is a top-viewed diagram of a metal layer deposited in aredistribution via hole, which has been partially filled by the metallayer, according to some embodiments of this disclosure.

FIG. 2B is a scanning electron microscopic (SEM) image showing across-sectional view after a metal layer deposited in a redistributionvia hole having an octagonal shape viewed from the top, according tosome embodiments of this disclosure.

FIG. 3 is a flow chart of forming an under bump metallization structureaccording to some embodiments of this disclosure.

FIGS. 4A-4D are cross-sectional diagrams showing a process of forming anunder bump metallization structure according to some embodiments of thisdisclosure.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the provided subjectmatter. Specific examples of components and arrangements are describedbelow to simplify the present disclosure. These are, of course, merelyexamples and are not intended to be limiting. For example, the formationof a first feature over or on a second feature in the description thatfollows may include embodiments in which the first and second featuresare formed in direct contact, and may also include embodiments in whichadditional features may be formed between the first and second features,such that the first and second features may not be in direct contact. Inaddition, the present disclosure may repeat reference numerals and/orletters in the various examples. This repetition is for the purpose ofsimplicity and clarity and does not in itself dictate a relationshipbetween the various embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly.

As stated above, since sub-micron metal interconnects become more andmore important in the present day semiconductor device, the problem ofRC delay may become more and more serious. Therefore, increasing thethickness of the sub-micron metal interconnects may be a solution to theincreasingly serious RC delay problem. However, when the thickness ofthe sub-micron metal interconnects is increased to solve RC delayproblem on the one hand, the poor step coverage problem of the depositedmetal layer may become more serious on the other hand. The under bumpmetallization also encounter the dilemma problem above.

For the present flip chip technology, redistribution metal layers areused to relocate I/O bonding pads of an integrated circuit (IC) to havethe advantages of lower cost, higher density, greater flexibility, andimproved performance. However, limited by the design rule, the areaoccupied by the redistribution via holes in a passivation layer coveringbonding pads and the spacing of the adjacent redistribution via holescannot be increased anymore. Therefore, increasing the thickness of theredistribution metal line is the only choice for decreasing RC delay ofthe latter formed redistribution metal layer, and the aspect ratio ofthe redistribution via holes is thus increased.

However, when the ratio of the thickness of the redistribution metalline over the diameter of the redistribution via hole was increased toat least 1.4, pin hole failure was created by poor step coverage of thedeposited metal layer. FIG. 1A is a top-viewed diagram of a metal layerdeposited in a conventional redistribution via hole, which has beenpartially filled by the metal layer. According to the design rule, theconventional redistribution via hole 100 has a shape in square viewedfrom the top. After the redistribution via hole 100 is formed in a firstpassivation layer (not shown in FIG. 1A) covering a metal pad (not shownin FIG. 1A), a first metal layer 110 begins to be deposited in theredistribution via hole 100 and cover the first passivation layer.

In FIG. 1A, the redistribution via hole 100 is partially filled, and itcan be seen that seams 120 are formed almost along the diagonal linesbetween adjacent edges of the redistribution via hole 100. This isbecause the centers of the edges of the redistribution via hole 100 havea faster metal deposition rate, and the corners of the redistributionvia hole 100 have a slower metal deposition rate. In addition to theuneven metal deposition rates described above, the angles 61 between theadjacent edges of the redistribution via hole 100 are smaller or equalto 90°. The smaller angles between the adjacent edges of theredistribution via hole 100 make it more easily to generate seams 120and produce overhangs (not shown in FIG. 1A) on the upper portion of thefirst metal layer 110 deposited in the redistribution via hole 100.These seams 120 and overhangs cause pin hole failure of the later-formedredistribution metal layer, since acid etching solutions used later forpatterning the first metal layer 110 to form the redistribution metallayer, patterning a second passivation layer covering the redistributionmetal layer, and patterning a second metal layer formed in a terminalvia hole in the second passivation layer will flow into the inside ofthe first metal layer 110 through these seams 120 and corrode the firstmetal layer 110.

Moreover, during the deposition of the first metal layer 110 in theredistribution via hole 100, if the problem of forming overhangs at theupper portion of the first metal layer 110 deposited in theredistribution via hole 100 is serious, a void may even formed in themetal layer 110 located in the redistribution via hole 100. The void mayaccumulate the acid etching solution to make the corrosion problem moreserious and greatly increase RC delay of the redistribution metal layer.

FIG. 1B is a scanning electron microscopic (SEM) image showing across-sectional view after a metal layer deposited in a conventionalredistribution via hole. The cross-sectional SEM image shown in FIG. 1Bis corresponding to the cross-section of cutting line BB′ in FIG. 1A. InFIG. 1B, a first passivation layer 140 was deposited on a metal pad 130.A redistribution via hole 100 was then formed in the first passivationlayer 140 to expose the metal pad 130. A first metal layer 110 was thendeposited to fill the redistribution via hole 100 and cover the firstpassivation layer 140. After patterning the first metal layer 110 toform a redistribution metal layer 110 a, a second passivation layer 150was subsequently deposited on the redistribution metal layer 110 a. Inthe SEM image shown in FIG. 1B, it can be clearly seen that a seriousU-shape corrosion region 125 was formed along the seams 120.Consequently, the yield of the IC chips was seriously decreased.

In light of the foregoing, how to solve the RC delay problem and the pinhole failure at the same time become a thorny issue. However, it wasfinally found that if the angles θ1 between adjacent edges of theredistribution via hole 100 was increased, the problem of the pin holefailure can be solved and the small RC delay can be maintained at thesame time.

FIG. 2A is a top-viewed diagram of a metal layer deposited in aredistribution via hole, which has been partially filled by the metallayer, according to some embodiments of this disclosure. In FIG. 2A, afirst metal layer 210 is deposited in a redistribution via hole 200formed in a first passivation layer (not shown in FIG. 2A) covering ametal pad. The redistribution via hole 200 is partially filled by thefirst metal layer 210. The redistribution via hole 200 in FIG. 2A has ashape in octagon viewed from the top. Therefore, the angles θ2 (135°)between adjacent edges of the redistribution via hole 200 having aoctagonal shape is larger than the angles θ1 (90°) between adjacentedges of the redistribution via hole 100 having a square shape in FIG.1A. It can be seen that no seams are formed between adjacent edges ofthe redistribution via hole 200.

FIG. 2B is a scanning electron microscopic (SEM) image showing across-sectional view after a metal layer deposited in a redistributionvia hole having an octagonal shape viewed from the top. Thecross-sectional SEM image shown in FIG. 2B is corresponding to thecross-section of cutting line BB′ in FIG. 2A. In FIG. 2B, aredistribution via hole 200 was formed in a first passivation layer 240covering a metal pad 230. A first metal layer 210 filled theredistribution via hole 200, and a second passivation layer 250 coveredthe first metal layer 210. It can be seen that no seams were formed inFIG. 2B, and thus no corrosion regions can be observed in FIG. 2B.

In light of the foregoing, it may be understand that when a metal layerdeposited in a via hole, the metal deposition rate at the corners of thevia hole may be increased as the angles θ between adjacent edges of thevia hole is increased, since the corners of the via hole has a more openspace. Therefore, the difference between the metal deposition rates atthe edge centers of the via hole and the corners of the via hole may bedecreased to have more evenly metal deposition rates, and the problem ofoverhangs may also be mitigated as well. The more evenly metaldeposition rates can avoid forming seams between adjacent edges of thevia hole and avoid forming overhangs, and thus can avoid pin holefailure of the metal plug formed later in the via hole. Therefore,increasing the angles θ between adjacent edges of the via hole is aneffective way to solve the problem of pin hole failure.

According to some embodiments, the angles θ between adjacent edges of avia hole is more than 90° to solve the problem of pin hole failure.According to some other embodiments, the angles θ between adjacent edgesof a via hole is at least 108° to solve the problem of pin hole failure.According to some other embodiments, the angles θ between adjacent edgesof a via hole is at least 135° to solve the problem of pin hole failure.Or in some embodiments, a via hole may be in a round shape to have theevenly metal deposition rate at every sites of the via hole.

According to some embodiments, a method of forming an under bumpmetallization structure is provided below. FIG. 3 is a flow chart offorming an under bump metallization structure according to someembodiments of this disclosure. FIGS. 4A-4D are cross-sectional diagramsshowing a process of forming an under bump metallization structureaccording to some embodiments of this disclosure. FIG. 3 and FIGS. 4A-4Dare referred below at the same time.

In step 310 of FIG. 3 and FIG. 4A, a first passivation layer 420 isformed on a metal pad 410 on a substrate 400. The substrate 400 has somesemiconductor devices (not shown in FIG. 4A) and some metal interconnectstructure (not shown in FIG. 4A) already formed thereon. The metal pad410 may be made from a metal, such as Al or Cu, or a metal alloy, suchas AlCu or AlCuSi. The formation method of the metal pad may beperformed by a deposition process followed by a patterning process. Thedeposition process above may be chemical vapor deposition, physicalvapor deposition or plating. The patterning process above may be acombination of photolithography and etching.

The first passivation layer 420 may be made from silicon nitride,undoped silicate glass, polyimide, or any combinations thereof. Forexample, the first passivation layer 420 may be a silicon nitride layer,according to some embodiments. The first passivation layer 420 may alsobe composed of a lower silicon nitride layer and an upper polyimidelayer, according to some other embodiments. The formation method of thefirst passivation layer 420 may be performed by chemical vapordeposition, spin coating, or a combination thereof.

In step 320 of FIG. 3 and in FIG. 4A, the metal pad 410 is exposed byforming a redistribution via hole 425 in the first passivation layer420. The formation method of the redistribution via hole 425 may beperformed by a photolithography process followed by an etching process.Viewed from the top, the redistribution via hole 425 has a round shapeor a polygon shape having angles between adjacent edges greater than90°, such as at least 108° or at least 135°. According to someembodiments, the diameter or the width of the redistribution via hole425 is from about 1 μm to about 4 μm.

In step 330 of FIG. 3 and in FIG. 4B, a first metal layer is thendeposited in the redistribution via hole 425 and on the firstpassivation layer 420. The first metal layer may be made from acomposite metal layer to meet the needs of adhesion, barrier, conductor,and protection. According to some embodiments, the first metal layer maybe made from a bottom metal layer and a top metal layer. The bottommetal layer may be Al, Ni, V, Cu, Ti, or NiV, and the top metal layermay be Ni, V, Cu, NiV, Cr, or W, for example. The deposition method ofthe first metal layer may be physical vapor deposition, chemical vapordeposition, or plating.

According to some other embodiments, when a ratio of a thickness of thefirst metal layer over the diameter (or the width) of the redistributionvia hole 425 is at least about 1.4, such as from about 1.4 to about 2.5,the angle between adjacent edges of the redistribution via hole 425 hasbetter to be greater than 90°, such as at least 108° or at least 135°,to avoid forming seams and overhangs. For example, when the diameter orthe width of the redistribution via hole 425 is about 2 μm, as long asthe thickness of the first metal layer is more than or equal to 2.8 μm,seams and overhangs will be generated and pin hole failure is thusproduced.

Subsequently in step 340 and FIG. 4B, the metal layer is then patternedto form a conductive redistribution layer 430. The patterning method maybe performed by a combination of photolithography and etching. Theetching solution used by the etching process may contain an acid, whichmay cause pin hole failure in the conductive redistribution layer 430located in the redistribution via hole 425 if seams are formed therein.

In step 350 of FIG. 3 and in FIG. 4C, a second passivation layer 440 isformed on the conductive redistribution layer 430 and the firstpassivation layer 420. The second passivation layer 440 may be made fromsilicon nitride, polyimide, or a combination thereof, for example. Theformation method of the second passivation layer 440 may be performed bychemical vapor deposition, spin coating, or a combination thereof.

In step 360 of FIG. 3 and in FIG. 4C, a portion of the conductiveredistribution layer 430 is exposed by forming a terminal via hole 445in the second passivation layer 440. The formation method of theterminal via hole 445 may be performed by a combination of aphotolithography process followed by an etching process. The etchingprocess may use an etching solution containing another acid. Similarly,the acid may cause pin hole failure in the conductive redistributionlayer 430 located in the redistribution via hole 425 if seams are formedtherein.

In step 370 of FIG. 3 and in FIG. 4D, a second metal layer is formed inthe terminal via hole 445 and on the second passivation layer 440. Thesecond metal layer may be made from a composite metal layer. Accordingto some embodiments, the second metal layer may comprise a bottomadhesion layer, a diffusion barrier layer, a solder-wettable layer, andan optional oxidation barrier layer. According to some otherembodiments, the second metal layer may be a composite metal layer ofCr/CrCu/Cu, Ti/NiV, Ti/Cu, Ti/W/Au, or Ni/Au.

In step 380 of FIG. 3 and in FIG. 4D, an under bump metal layer 450 isformed by patterning the second metal layer. The patterning method ofthe second metal layer may be performed by a combination ofphotolithography and etching process. The etching solution used by theetching process may contain an acid, which may cause pin hole failure inthe conductive redistribution layer 430 located in the redistributionvia hole 425 if seams are formed therein.

Accordingly, although limited by the design rule, the area occupied byeach redistribution via holes and the spacing between adjacentredistribution via holes cannot be increased anymore. RC delay problemand pin hole failure still can be resolved by increasing the height ofthe redistribution layer and changing the shape of the redistributionvia holes from square to round or polygon having angles between adjacentedges of the redistribution via holes more than 90°.

According to some embodiments, a structure of a redistributionmetallization is provided. The redistribution metallization structurecomprises an insulating passivation layer having a redistribution viahole as well as a conductive redistribution layer filling theredistribution via hole and disposed on the passivation layer. Theredistribution via hole exposes a metal pad disposed on a substrate andhas a round shape or a polygon shape viewed from top, and the polygonshape has an angle between adjacent edges greater than 90°.

According to some other embodiments, a structure of an under bumpmetallization is provided. The under bump metallization structurecomprises a metal pad on a substrate, a first passivation layer disposedon the metal pad and having a redistribution via hole exposing the metalpad, having a redistribution via hole exposing the metal pad, aredistribution layer disposed in the redistribution via hole and on thefirst passivation layer, a second passivation layer disposed on theredistribution layer and having a terminal via hole exposing a part ofthe redistribution layer, and an under bump metal layer disposed in theterminal via hole and on the second passivation layer. Theredistribution via hole above has a round shape or a polygon shapehaving an angle between adjacent edges greater than 90°, viewed fromtop.

According to some other embodiments, a method of forming an under bumpmetallization structure is provided. The method comprises the followingoperations. A first passivation layer is formed on a metal pad disposedon a substrate. The metal pad is exposed by forming a redistribution viahole in the first passivation layer, and the redistribution via hole hasa round shape or a polygon shape having an angle between adjacent edgesgreater than 90°. A first metal layer is formed in the redistributionvia hole and on the first passivation layer. A redistribution layer isformed by patterning the first metal layer. A second passivation layeris formed on the redistribution layer. A portion of the redistributionlayer is exposed by forming a terminal via hole in the secondpassivation layer. A second metal layer is formed in the terminal viahole and on the second passivation layer. An under bump metal layer isformed by patterning the second metal layer.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

What is claimed is:
 1. A method of forming a redistribution layer, themethod comprising: forming a first passivation layer on a metal paddisposed on a substrate; exposing the metal pad by forming aredistribution via hole in the first passivation layer, wherein theredistribution via hole has a polygon shape having an angle betweenadjacent edges greater than 90°, in a top view; depositing a first metallayer in the redistribution via hole and on the first passivation layer;and forming a redistribution layer by patterning the first metal layer,wherein a ratio of a thickness of the redistribution layer over thediameter of the redistribution via hole is about 1.4 to about 2.5. 2.The method of claim 1, wherein the first passivation layer is made fromsilicon nitride, undoped silicate glass, polyimide, or any combinationsthereof.
 3. The method of claim 1, wherein the redistribution layercomprises a composite metal layer.
 4. The method of claim 1, wherein theangle between adjacent edges of the polygon shape is at least 108°. 5.The method of claim 1, wherein the angle between adjacent edges of thepolygon shape is at least 135°.
 6. The method of claim 1, whereinforming the first passivation layer is performed by chemical vapordeposition, spin coating, or a combination thereof.
 7. The method ofclaim 1, wherein forming the redistribution via hole is performed by aphotolithography process followed by an etching process.
 8. The methodof claim 1, wherein depositing the first metal layer is performed byphysical vapor deposition, chemical vapor deposition, or plating.
 9. Themethod of claim 1, further comprising forming an under bump metal layerover the redistribution layer.
 10. The method of claim 9, furthercomprising forming a second passivation layer between the redistributionlayer and the under bump metal layer.
 11. The method of claim 10,wherein the second passivation layer has a terminal via exposing theredistribution layer and a portion of the under bump metal layer isdisposed in the terminal via.
 12. A method of forming a redistributionlayer, the method comprising: forming a first passivation layer on ametal pad disposed on a substrate; exposing the metal pad by forming aredistribution via hole in the first passivation layer; depositing afirst metal layer in the redistribution via hole and on the firstpassivation layer, wherein the lowest portion of a top surface of thefirst metal layer is in a position higher than a top surface of thefirst passivation layer, and a portion of the first metal layer is incontact with the top surface of the first passivation layer; and forminga redistribution layer by patterning the first metal layer, wherein aratio of a thickness of the redistribution layer over a diameter of theredistribution via hole is at least 1.4.
 13. The method of claim 12,wherein the redistribution via hole has a polygon shape, an anglebetween adjacent edges of the polygon shape being at least 108°.
 14. Themethod of claim 12, further comprising forming an under bump metal layerover the redistribution layer.
 15. The method of claim 14, furthercomprising forming a second passivation layer between the redistributionlayer and the under bump metal layer.
 16. The method of claim 15,wherein the second passivation layer has a terminal via exposing theredistribution layer and a portion of the under bump metal layer isdisposed in the terminal via.
 17. A method of forming a redistributionlayer, the method comprising: forming a first passivation layer on ametal pad disposed on a substrate; exposing the metal pad by forming aredistribution via hole in the first passivation layer; depositing afirst metal layer in the redistribution via hole and on the firstpassivation layer; and forming a redistribution layer by patterning thefirst metal layer, wherein a ratio of a thickness of the redistributionlayer over the diameter of the redistribution via hole is about 1.4 toabout 2.5, and no seams and overhangs are formed at the redistributionlayer in the redistribution via hole.
 18. The method of claim 17,further comprising forming an under bump metal layer over theredistribution layer.
 19. The method of claim 18, further comprisingforming a second passivation layer between the redistribution layer andthe under bump metal layer.
 20. The method of claim 19, wherein thesecond passivation layer has a terminal via exposing the redistributionlayer and a portion of the under bump metal layer is disposed in theterminal via.